SFM6000D-5SLM
FLOW SENSOR, 0.01 TO 5LPM, 5 TO 50DEG C
| Manufacturer | SENSIRION |
|---|---|
| Manufacturer Part No | SFM6000D-5SLMCopy |
| Manufacturer Standard Lead Time | 10 weeks |
| Order Code | 4145356 |
| Product Range | SFM6000D Series |
| Your Part Number | |
| Technical Datasheet |
Need more?
| Quantity | Price |
|---|---|
| 1+ | RM1,155.690 |
| 5+ | RM1,118.870 |
Product Information
| Manufacturer | SENSIRION |
|---|---|
| Manufacturer Part No | SFM6000D-5SLMCopy |
| Manufacturer Standard Lead Time | 10 weeks |
| Order Code | 4145356 |
| Product Range | SFM6000D Series |
| Technical Datasheet | |
| Sensor Type | Flow Sensor |
| Flow Rate Min | 0.01l/min |
| Flow Rate Max | 5l/min |
| Operating Pressure Min | - |
| Operating Pressure Max | - |
| Port Style | Push-In Tube |
| Supply Voltage Min | 22.8V |
| Supply Voltage Max | 25.2V |
| Accuracy % | 0.2% |
| Accuracy | ± 0.2% |
| Media Type | Air, Carbon Dioxide, Dioxygen, Nitrogen |
| Process Connection Size | - |
| Process Connection Type | - |
| Pipe Size | - |
| Sensor Mounting | - |
| Operating Temperature Min | 5°C |
| Operating Temperature Max | 50°C |
| Product Range | SFM6000D Series |
| SVHC | No SVHC (12-Jan-2017) |
| Pressure Max | 10bar |
| Supply Voltage DC Max | 25.2V |
| Supply Voltage DC Min | 22.8V |
Product Overview
SFM6000D-5SLM is a digital mass flow controller. This measures gas mass flow by the calorimetric principle based on heat transfer. A heater element on a thermally insulated membrane and two thermopiles up-stream and downstream are integrated on a single silicon chip. In the presence of gas flow, the temperature distribution up and downstream is disturbed. This asymmetry is then measured. The measurement area as well as the A/D converter and further signal processing are based on a single chip using CMOS standard processes. Moreover, the same chip also takes over the function of a microprocessor in a standard mass flow controller, directly regulating the valve.
- 5 – 0.01slm flow range
- Disruptive concept combining plastic body and highly integrated electronics
- Small form factor and low weight
- High accuracy/repeatability (2% / 0.2% of set point)
- Wide control range (500:1), ultra-fast settling time (100ms)
- RS485 and I²C digital interface
- Exchangeable 6mm push-in and down mount connectors
- NIST traceable calibration
- No drift and no re-calibration required in the field
- NIST traceable calibration
Technical Specifications
| Sensor Type | Flow Sensor |
|---|---|
| Flow Rate Max | 5l/min |
| Operating Pressure Max | - |
| Supply Voltage Min | 22.8V |
| Accuracy % | 0.2% |
| Media Type | Air, Carbon Dioxide, Dioxygen, Nitrogen |
| Process Connection Type | - |
| Sensor Mounting | - |
| Operating Temperature Max | 50°C |
| SVHC | No SVHC (12-Jan-2017) |
| Supply Voltage DC Max | 25.2V |
| Flow Rate Min | 0.01l/min |
|---|---|
| Operating Pressure Min | - |
| Port Style | Push-In Tube |
| Supply Voltage Max | 25.2V |
| Accuracy | ± 0.2% |
| Process Connection Size | - |
| Pipe Size | - |
| Operating Temperature Min | 5°C |
| Product Range | SFM6000D Series |
| Pressure Max | 10bar |
| Supply Voltage DC Min | 22.8V |
Associated Products
4 Products Found
Legislation and Environmental
| Country of Origin: Country in which last significant manufacturing process was carried outCountry of Origin: | Switzerland Country in which last significant manufacturing process was carried out |
|---|---|
| Tariff No: | 90268020 |
| US ECCN: | EAR99 |
| EU ECCN: | NLR |
| RoHS Compliant: | Yes RoHS |
| RoHS Phthalates Compliant: | Yes RoHS |
| SVHC: | No SVHC (12-Jan-2017) |
| Download Product Compliance Certificate | Product Compliance Certificate |
| Weight (kg): | .09 |