SLQ-QT105
Flow Meter, Flowmeter, 12 bar, 4.5 V
| Manufacturer | SENSIRION |
|---|---|
| Manufacturer Part No | SLQ-QT105Copy |
| Manufacturer Standard Lead Time | 10 weeks |
| Order Code | 3934917 |
| Your Part Number | |
| Technical Datasheet |
Need more?
| Quantity | Price |
|---|---|
| 1+ | RM11,147.470 |
Product Information
| Manufacturer | SENSIRION |
|---|---|
| Manufacturer Part No | SLQ-QT105Copy |
| Manufacturer Standard Lead Time | 10 weeks |
| Order Code | 3934917 |
| Technical Datasheet | |
| Sensor Type | Flowmeter |
| Flow Rate Min | - |
| Flow Rate Max | - |
| Operating Pressure Min | - |
| Operating Pressure Max | 12bar |
| Supply Voltage Min | 4.5V |
| Supply Voltage Max | 5.5V |
| Accuracy % | 10% |
| Accuracy | ± 10% |
| Media Type | Liquid |
| Process Connection Size | - |
| Process Connection Type | - |
| Pipe Size | - |
| Sensor Mounting | Cable |
| Operating Temperature Min | 20°C |
| Operating Temperature Max | 25°C |
| Product Range | - |
| SVHC | No SVHC (12-Jan-2017) |
| Pressure Max | 12bar |
| Supply Voltage DC Max | 5.5V |
| Supply Voltage DC Min | 4.5V |
Product Overview
High purity millilitre flow meter for hydrocarbons. Tailored to the integration in demanding coating systems, the SLQ-QT105 is a semicon grade-sensor solution for flow rates of up to 120ml/min of hydrocarbon-based liquids like photoresists and solvents. Based on Sensirion's proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The short response time of the SLQ-QT105 allows the accurate monitoring of highly dynamic processes such as fast dosing operations. Equipped with fittings for 4x3mm PFA tubing, this reliable device works without any moving parts measuring non-invasively through the wall of a straight flow path. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.
- Full scale flow rate (IPA) of 120ml/min, sensitive to low flow rates, straight flow channel
- Accuracy of 10%, high purity at up to 2ml/s, super-fast sampling speed
- Repeatability (IPA) of 2%, fast measurement response for dosing monitoring
- Maximum operating pressure of 12bar
- Supply voltage of 4.5V to 5.5V
- Average supply current of 20µA
- Maximum supply current of 100µA
- Analog voltage, analogue current, I²C, RS485 interfaces
- Package size (L x W x H) of 65 x 33.5 x 20mm3
- Used in semiconductor industry
Technical Specifications
| Sensor Type | Flowmeter |
|---|---|
| Flow Rate Max | - |
| Operating Pressure Max | 12bar |
| Supply Voltage Max | 5.5V |
| Accuracy | ± 10% |
| Process Connection Size | - |
| Pipe Size | - |
| Operating Temperature Min | 20°C |
| Product Range | - |
| Pressure Max | 12bar |
| Supply Voltage DC Min | 4.5V |
| Flow Rate Min | - |
|---|---|
| Operating Pressure Min | - |
| Supply Voltage Min | 4.5V |
| Accuracy % | 10% |
| Media Type | Liquid |
| Process Connection Type | - |
| Sensor Mounting | Cable |
| Operating Temperature Max | 25°C |
| SVHC | No SVHC (12-Jan-2017) |
| Supply Voltage DC Max | 5.5V |
Technical Docs (2)
Associated Products
6 Products Found
Legislation and Environmental
| Country of Origin: Country in which last significant manufacturing process was carried outCountry of Origin: | Switzerland Country in which last significant manufacturing process was carried out |
|---|---|
| Tariff No: | 90261089 |
| US ECCN: | EAR99 |
| EU ECCN: | NLR |
| RoHS Compliant: | Yes RoHS |
| RoHS Phthalates Compliant: | Yes RoHS |
| SVHC: | No SVHC (12-Jan-2017) |
| Download Product Compliance Certificate | Product Compliance Certificate |
| Weight (kg): | .08 |